Specialized Mass Flow Controller - MEMS MFC

LM030C

본문

Model LM030C
Range(N2) 0.01slpm~30slpm
Response Time < 1 sec
Accuracy ±1% of FS
Repeatability ±0.25%
In/Out Signal 0~5Vdc or 4~20mA
Supply Power +15 or +24Vdc
Max Operating Pressure < 10 bar
Max Operating Temp 0~50℃
Leak Rate 1X10-9atm. cc/sec
Control Range 3~100%


Connection "A" Dimension(mm)
1/8" SW 126.7
1/4" SW 128
3/8" SW 134.3
1/4" VCR 127.8

 

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