Specialized Mass Flow Controller - EX-Proof MFC

EX070C

본문

Model EX070C
Range(N2) 0.01slpm~70slpm
Response Time < 2 sec
Accuracy ±1% of FS
Repeatability ±0.25%
In/Out Signal 0~5Vdc or 4~20mA
Supply Power +15 or +24Vd
Max Operating Pressure < 90 bar
Max Operating Temp 0~50℃
Leak Rate 1X10-9atm. cc/sec
Control Range 3~100%


Connection "A" Dimension(mm)
3/8" SW 178.8
1/2" SW 191
3/4" SW 192.6

 


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