Model
M3030V
M3030A
  Range(N2)   5sccm ~ 30000sccm   5sccm ~ 30000sccm
  Response Time   ≤3 sec   ≤3 sec
  Accuracy   ≤±1% FS   ≤±1% FS
  Repeatability   ≤±0.25% FS   ≤±0.25% FS
  In/Out Signal   0~5 Vdc   0~5 Vdc OR 4~20 mA
  Supply Power   ±15 Vdc, 350mA   ±15 Vdc, 350mA
  Max. Operating Pressure   ≤90 bar   ≤90 bar
  Max. Operating Temp   0~50 °C   0~50 °C
  Leak Rate   1*10E-9 atm cc/sec   1*10E-9 atm cc/sec
  Control Range   5 ~ 100% for max range   5 ~ 100% for max range
Mass Flow Measurement
No Temparature or Pressure Correction Needed
Compact Flow Control System
High Accuracy
Wide Pressure Range (90bar)
High Response Time
High Repeatability